opc is considered to be useful in two ways : first it enables smaller features with closer proximities to be printed on the same area; second, it increases the process latitude, decreases the variations of linewidth across a chip and could potentially enhance yield opc是非常有用的,一方面使用opc,能在相同的面积上加工出更小的特征线宽;另一方面,使用opc提高了工艺窗口,降低了整个芯片特征尺寸的变化,潜在地提高了集成电路的生产成品率。